High Acceleration Magnetically Suspended Linear Stage

This project is ongoing.

We are working on the design, modeling, control, and prototyping for a new type of magnetically suspended linear stage with high-acceleration for next-generation photolithography scanners for semiconductor manufacturing applications.

Please contact Dr. Zhou for more details about the topic.

Project Website
http://sites.utexas.edu/pmcl/
Project Timeline

Flexible

Duties

- Sensor and actuator selection and characterization
- Prototyping the magnetically suspended linear stage
- Experimental tests for stage performance

Tags
control
dynamics
electromagnetics
manufacturing
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Project Lead
Who to Contact
Lei Zhou
Contact Email
lzhou@utexas.edu

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