High-throughput Atomic Force Microscopy for Semiconductor Inspection

This project is closed. No applications are allowed.

Interested in seeing the nanoworld? We have an exciting research project for you on this topic. The Mechatronics Research Lab currently have multiple UROP openings for the Atomic Force Microscope (AFM) project. The goal of the project is to improve AFM throughput for semiconductor inspection. 

AFM is a powerful and versatile instrument with a wide variety of applications including nano-scale topography imaging, material property characterizing, nano-scale manipulation, nanofabrication, etc. In the Mechatronics Research Lab, we specialize in design, control, instrumentation and signal processing techniques to achieve ultra-high imaging speed, extend operation environment for specialized applications. 

In the past, we have developed high bandwidth nanopositioners and control algorithms for high-speed local scanning to enable nanoscale visualization of dynamic processes. Meanwhile, using advanced nanofabrication techniques, we created parallel active cantilever array to conduct simultaneous AFM imaging, which is suitable for throughput improvement when scanning over a large area of static samples. In this work, we intend to combine such expertise to further improve AFM imaging throughput targeting semiconductor applications.

Qualifications

Requirement: Junior or senior major in mechanical engineering or electrical and computer engineering (highly motivated Sophomore students with relevant experiences also possible)

Undergraduate Research Assistants working on this project are expected to be interested in mechatronic system development involving system modeling, control algorithm, embedded system programing, mechanical/circuit design, manufacturing, etc.  Experience with Solidworks, LabVIEW, circuit design software, Matlab, and instructional material development is a plus. In person work is required for access to the hardware. 

Project Timeline

Students are expected to work closely with graduate students leading the project for 8 - 10 hours per week during the Fall semester for pay or for credit with opportunities to continue in the future. Given the longer-term nature of the project, preference will be given to students who can commit to multiple terms.

Duties

In this project, the focus is placed on design/fabrication, circuit instrumentation, and embedded system programing. This position will also involve some documentation work of a previously developed educational AFM system and a mechatronics textbook to be used in a precision mechatronic system design class. Specific duties may include but not limited to the following:

1)            CAD design and machining

2)            PCB design, prototyping and testing

3)            Testing of nanopositioners 

4)            LabVIEW code for system identification and control

5)            Documentation of AFM prototyping process 

If you are interested, please contact Prof. Fangzhou Xia (Fangzhou.xia@austin.utexas.edu).

Typical Time Commitment
8-10
Desired Length of Commitment
>=2

I'M INTERESTED IN THIS PROJECT. WHAT SHOULD I DO NEXT?

The Office of Undergraduate Research recommends that you attend an info session or advising before contacting faculty members or project contacts about research opportunities. We'll cover the steps to get involved, tips for contacting faculty, funding possibilities, and options for course credit. Once you have attended an Office of Undergraduate Research info session or spoken to an advisor, you can use the "Who to contact" details for this project to get in touch with the project leader and express your interest in getting involved.

Have you tried contacting professors and need more help? Schedule an appointment for additional support.